headline_products_clean_room-semiconductorheadline_products_clean_room-lcdheadline_products_clean_room-controls

Products: Semiconductor

Transport


Overhead Hoist Transport (OHT) serves both Intra-bay and Inter-bay delivery to both tool-to-tool and Clean Room storage for highly efficient process management. Muratec's OHT systems are protected by one or more patents including without limitation: US Patent Nos. 6183184,7165927,7441999,7771153, and 8197172. Other patents are pending.



Storage

Clean Depot Systems facilitate efficient storage within the Clean Room. Storage and retrieval commands are automatically issued for transport equipment in the Inter/Intra Bay and to operators in the Clean Room area.