Visit us at booth #2311

Semiconductor

• Shorten transportation lead times.
• Improve storage efficiency.
• Improve device reliability.

Our Solution

• Intra-bay transportation systems reduce conveyance lead times by sending items directly from one tool port to another tool port.
• Inter-bay transportation systems transport large quantities of in-process items at high-speeds to the clean depot system nearest the next process.

Features of Installed Equipment

Clean Depot Systems

• Facilitates efficient storage within the Clean room. Storage and retrieval commands are automatically issued for transport equipment in the Inter/Intra Bay and to operators in the clean room area.

 

 

 

 

Intra-bay Automated Overhead Traveling Vehicles

• Helps shorten transportation lead times.
• Effectively utilizes ceiling space and reduces factory footprint.
• Unified track delivery system capable of direct tool to tool transport anywhere in fab.
• Features unique ZFS (zero footprint storage) to significantly reduce the need forstockers and improve delivery times throughout the fab.

Inter-bay Automated Overhead Traveling Vehicles

• Transportation of large quantities of in-process items between depots.

Murata AMHS Control System (MACS)

• Host computer (MACS) issues the commands to each conveyance device and controls and monitors the status of these devices.