Clean Room Transport

Intra-bay Automated Overhead Traveling Vehicles

• Helps shorten transportation lead times.
• Effectively utilizes ceiling space and reduces factory footprint.
• Unified track delivery system capable of direct tool to tool transport anywhere in the fab.
• Features unique ZFS (zero footprint storage) to significantly reduce the need for stockers and improve delivery times throughout the fab.

Inter-bay Automated Overhead Traveling Vehicles

• Transportation of large quantities of in-process items between depots.