For transport that is flexible and highly accurate, one solution includes our Automated Guided Vehicles (AGV). Our AGVs are automated transport systems that travel on the floor. Engineered with an interconnected robot arm, this system has direct access to load ports of process equipment and stockers. These vehicles are designed to be flexible and highly accurate and can operate through complex routes using a high-accuracy navigation system.
Our High-Speed Conveyor (HTC) systems are designed to provide bridging and queuing solutions for multi-system automation. With the ability to be mounted on the ceiling or floor, these systems are engineered with turntable directional sections. These sections ensure correct carrier orientation and directional travel.
When it comes to high-speed, convenient, and reliable solutions, our clients know that they can count on us to have the answer. Our stocker systems are used for WIP carrier storage, but are also frequently used for high-speed and convenient interfloor transport.
OVERHEAD HOIST TRANSPORT
Widely recognized as the main transport system for next-generation fabrication plants, Overhead Hoist Transport (OHT) enables direct tool-to-tool, tool-to-buffer, and buffer-to-tool transportation of WIP carriers. The machines can feature front opening unified pods (FOUP) for highly efficient process flow and inventory management.
As part of our Clean Room Transport systems, we also offer an OverHead Shuttle (OHS), which transports carriers on an overhead track. This shuttle is a perfect fit for those seeking to transport carriers between allocated storage equipment, such as stockers that are near manufacturing process areas in the factory. Typically used as an inter-bay type of transport system, our OHS is most commonly used in 200mm fabrication plants for wafer cassettes, pod, or box handling.