Clean factory AGVs move cassettes, transportation boxes, and reticles for lithographic processes up to 1,100 lbs. in clean room environments. Equipped with a Selective Compliance Articulated Robot Arm (SCARA), these vehicles travel by floor and reach stocker and process equipment directly.

Vehicles travel on complex routes via high-accuracy navigation systems that transport carriers to the process equipment. IR transceivers mounted on top of vehicles communicate to IR transponders mounted in ceiling grids.