Murata Machinery USA, Inc.

Class 1 Clean Factory Compliant for Transport, Pick-Up & Delivery in Complex Routes

M4-200 & M4-300 Clean Shuttles

Clean factory AGVs move cassettes, transportation boxes, and reticles for lithographic processes up to 1,100 lbs. in clean room environments. Equipped with a Selective Compliance Articulated Robot Arm (SCARA), these vehicles travel by floor and reach stocker and process equipment directly.

Vehicles travel on complex routes via high-accuracy navigation systems that transport carriers to the process equipment. IR transceivers mounted on top of vehicles communicate to IR transponders mounted in ceiling grids.

Use Applications
Clean Room Transfer, Production Pick-Up/Delivery
Specifications

Navigation

Magnetic Spot JIRO

Travel Speed

196 ft/min
90 m/min

Battery

Ni-CD Multi Cell

Temperature

32° F to 104° F
0° C to 40° C

Material Handling Type

Selective Compliance Articulated Robot Arm 200/300 mm

Load Capacity (max)

1100 lbs
500 kg

Safety

Beam Sensors
Bumper Sensors
Laser Scanner
Emergency Stop
Warning Sounds
FOUP/FOSB Sensors

Environment

Indoor

Communication

Ethernet

Lift Height or Lift Stroke

None

Charging Method

Opportunity Charge

Automated Guided Vehicles: Buyer's Guide

A comprehensive guide to AGVs and how they help you reduce labor needs, remove opportunities for human error, and improve working
conditions.

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Differentiators at a Glance

Class 1 (0.1 μm) clean factory compliant,

transferring products safely and efficiently.

Infrared sensor navigation,

delivering environment recognition and collision avoidance

Equipped with SCARA,

reaching and transporting stockers, cassettes, boxes, or reticles for lithographic processes.

Muratec M4 Clean Shuttles automate clean room delivery, transfer, and pick-up

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